Material Detail

Photolithography Overview for MEMS

Photolithography Overview for MEMS

This YouTube video, created by�Southwest Center for Microsystems Education (SCME), provides an overview of the photolithography_. The lecture runs for 12:02 seconds and covers photolithography as a part of the MEMS fabrication process, including the steps of production. More information can be found on the SCME website.�


  • Editor Reviews
  • User Rating
  • Comments
  • Learning Exercises
  • Bookmark Collections
  • Course ePortfolios
  • Accessibility Info

More about this material


Log in to participate in the discussions or sign up if you are not already a MERLOT member.