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MEMS Micromachining Overview Learning Module

MEMS Micromachining Overview Learning Module

The Southwest Center for Microsystems Education presents this learning module on micromachining. The module provides an overview of three widely used micromachining processes for fabricating microsystems or MEMS: bulk, surface and LIGA. This resource includes instructor and participant guides as well as a powerpoint presentation. Visitors are encouraged to create an account and login in order to access the full set of resources.... Show More


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