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Material Detail

Photolithography Overview for MEMS

Photolithography Overview for MEMS

This page from the Southwest Center for Microsystems Education features a learning module which describes a general overview of the photolithography process use in the fabrication of microsystems as well as integrated circuits. A participant guide, instructor guide (both in PDF format) and a comprehensive powerpoint presentation are included. Users are encouraged to register and log in in order to access the full content on the site.... Show More
Keywords:
stem education, workforce development, technician training, advanced technological education
Disciplines:
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More about this material

Material Type:
Reference Material
Date Added to MERLOT:
August 3, 2016
Date Modified in MERLOT:
August 3, 2016
Author:
Submitter:
Barbra Bied Sperling
Hispanic Serving Institution
Primary Audience:
College General Ed, College Lower Division, College Upper Division, Graduate School, Professional
Technical Format:
Website
Mobile Compatibility:
Not specified at this time
Language:
English
Cost Involved:
No
Source Code Available:
No
Creative Commons:
No

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