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Etch Overview for Microsystems Learning Module

Etch Overview for Microsystems Learning Module

This page from the Southwest Center for Microsystems Education features a learning module which presents a general overview of various etch processes used in the construction of microsystems. A participant guide, instructor guide (both in PDF format) and a comprehensive powerpoint presentation are included. Furthermore, an additional presentation describes the rainbow wafer activity which teaches students to interpret graphs and charts related to silicon dioxide thickness on a silicon wafer

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