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Double Exposure Makes Dense High-Resolution Diffractive Optics

Double Exposure Makes Dense High-Resolution Diffractive Optics

This article from SPIE discusses an electron-beam-lithography technique which fabricates diffractive optical structures such as classic Fresnel-zone-plate lenses with fine features. Diffractive optical elements are especially useful in parts of the electromagnetic spectrum, such as the soft x-ray region, where suitable materials for reflective and refractive structures are not available.... Show More

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