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Material Detail

How a Plasma Etcher Works

How a Plasma Etcher Works

This website includes an animation which illustrates how a Plasma Etcher works. Objective: Describe all the steps used to load, etch, and unload a wafer from a plasma etcher. This simulation is from Module 048 of the Process & Equipment II Cluster of the MATEC Module Library (MML). You can find this animation under the section "Process & Equipment II." To view other clusters or for more information about the MML visit http://matec.org/ps/library3/process_I.shtmlKey
Keywords:
stem education, workforce development, technician training, advanced technological education
Disciplines:
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More about this material

Material Type:
Presentation
Date Added to MERLOT:
July 18, 2016
Date Modified in MERLOT:
July 18, 2016
Author:
Submitter:
Barbra Bied Sperling
Hispanic Serving Institution
Primary Audience:
Grade School, Middle School, High School, College General Ed, College Lower Division, College Upper Division, Graduate School, Professional
Technical Format:
Website, Flash
Mobile Compatibility:
Not specified at this time
Language:
English
Cost Involved:
No
Source Code Available:
No
Creative Commons:
No

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