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Entrapment Type Vacuum Pumps

Entrapment Type Vacuum Pumps

This is a description for a learning module from Maricopa Advanced Technology Education Center. This PDF describes the module; access may be purchased by visiting the MATEC website. Entrapment type pumps operate primarily in the high to ultra-high vacuum ranges. The discussion in this MATEC module includes applications, theory of operation, operating range and preventative maintenance. The focus is on three major types of pumps: cryosorption, cryogenic and sputter-ion. The overall performance of these types of pumps depends on a variety of parameters. For example, it is important that learners understand the balance between pumping speed and capacity. Competency is demonstrated as the learners specify systems for defined process applications.


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