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Leak Detection in Vacuum Technology

Leak Detection in Vacuum Technology

This is a description for a learning module from Maricopa Advanced Technology Education Center. This PDF describes the module; access may be purchased by visiting the MATEC website. This module explains the importance of determining vacuum system integrity through leak qualification tests. Learners are introduced to a systematic set of methods for determining the existence of a leak, as well as its size, type and location. Emphasis is placed on the use of a helium mass spectrometer leak detector (MSLD). The centerpiece of this module is a computer program that simulates leak detection with an MSLD.


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