Material Detail
6.781J / 2.391J Submicrometer and Nanometer Technology
This course surveys techniques to fabricate and analyze submicron and nanometer structures, with applications. Optical and electron microscopy is reviewed. Additional topics that are covered include: surface characterization, preparation, and measurement techniques, resist technology, optical projection, interferometric, X-ray, ion, and electron lithography; Aqueous, ion, and plasma etching techniques; lift-off and electroplating; and ion implantation. Applications in microelectronics, microphotonics, information storage, and nanotechnology will also be explored.AcknowledgementsThe Instructors would like to thank Bob Barsotti, Bryan Cord, and Ben Wunsch for their work on the Atomic Force Microscope video. They would also like to thank Bryan Cord for creating each video.
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More about this material
- Material Type:
- Online Course
- Date Added to MERLOT:
- August 10, 2012
- Date Modified in MERLOT:
- June 12, 2018
- Authors:
-
Prof. George Barbastathis
Prof. Henry Smith
Prof. Karl Berggren - Submitter:
-
Barbra Bied Sperling
- Primary Audience:
- College General Ed, College Lower Division
- Mobile Compatibility:
- Not specified at this time
- Language:
- English
- Cost Involved:
- No
- Source Code Available:
- Unknown
- Creative Commons:
-
This work is licensed under a Attribution-NonCommercial-ShareAlike 3.0 United States
