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Dry Thermal Oxidation Process

Dry Thermal Oxidation Process

In this YouTube video, created by�Southwest Center for Microsystems Education (SCME), viewers can watch an animation on the dry thermal oxidation process. This animation "illustrates the chemistry of a dry thermal oxidation process that is used to grow silicon dioxide (SiO2) on a silicon (Si) wafer. In a dry oxidation process, oxygen gas (O2) interacts with the silicon atoms at the SiO2 - Si interface to form SiO2. This process is discussed in more detail in the Deposition Overview for MEMS Learning Module" which can be found on the SCME website along with supplementary materials.�
Keywords:
stem education, workforce development, technician training, advanced technological education
Disciplines:
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More about this material

Material Type:
Reference Material
Date Added to MERLOT:
August 3, 2016
Date Modified in MERLOT:
August 3, 2016
Author:
Submitter:
Barbra Bied Sperling
Hispanic Serving Institution
Primary Audience:
Grade School, Middle School, High School, College General Ed, College Lower Division, College Upper Division, Graduate School, Professional
Technical Format:
Video
Mobile Compatibility:
Not specified at this time
Language:
English
Cost Involved:
No
Source Code Available:
No
Accessibility Information Available:
Unknown
Creative Commons:
No

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