Material Detail

Thirteen tutorials developed by the Electrical Engineering Department at the University of Washington are presented on this site. The documents are intended to give students and other interested people with a familiarity of electrical engineering principles and microelectromechanical systems (MEMS) an overview of microfabrication, as well as "a little semiconductor background, and history." Some of the topics that are covered include photolithography, photoresists, and vacuum systems, to name a few. There is also an especially interesting tutorial on clean room design and operation.

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