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Ion Implant Pinball Game

Ion Implant Pinball Game

The magnetic force of the ions can be compared to a pinball machine with three different masses. If the same impulse is applied to each ball, only the one with the ideal mass will "hit" the target. The objective is to describe how the mass affects implantation. This simulation is from Module 026 of the Process & Equipment III Cluster of the MATEC Module Library (MML).... Show More

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