1. Home
  2. Material Detail: 193nm Immersion Lithography: Status and Challenges

Material Detail

193nm Immersion Lithography: Status and Challenges

193nm Immersion Lithography: Status and Challenges

This article is a comprehensive review of 193nm immersion lithography. It focuses on the materials and processes rather than the optical system of the tool. The article covers the history and current status of the technology.
Keywords:
stem education, workforce development, technician training, advanced technological education
Disciplines:
Go to Material 
Bookmark / Add to Course ePortfolio
Create a Learning Exercise
Add Accessibility Information
Rate
Add a Comment

Quality

  • User Rating
  • Comments
  • Learning Exercises
  • Bookmark Collections
  • Course ePortfolios
  • Accessibility Info

More about this material

Material Type:
Reference Material
Date Added to MERLOT:
July 18, 2016
Date Modified in MERLOT:
July 18, 2016
Author:
Submitter:
Barbra Bied Sperling
Hispanic Serving Institution
Primary Audience:
Grade School, Middle School, High School, College General Ed, College Lower Division, College Upper Division, Graduate School, Professional
Technical Format:
Website
Mobile Compatibility:
Not specified at this time
Language:
English
Cost Involved:
No
Source Code Available:
No
Accessibility Information Available:
Unknown
Creative Commons:
No

Browse...

Disciplines with similar materials as 193nm Immersion Lithography: Status and Challenges
People who viewed this also viewed
Other materials like 193nm Immersion Lithography: Status and Challenges

Comments

Log in to participate in the discussions or sign up if you are not already a MERLOT member.