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The Diffusion Process

The Diffusion Process

This is a description for a learning module from Maricopa Advanced Technology Education Center. This PDF describes the module; access may be purchased by visiting the MATEC website. In an orderly and comprehensive set of lectures, lessons, and laboratory activities, MATEC explicates for your learners the complex process of diffusion. Beginning with an overview of diffusion's purpose in altering a wafer's electrical characteristics, the module then drills down to specifics: process parameters, different techniques of diffusion, the use of a hot probe to evaluate diffusion, and wafer handling. Your learners demonstrate their new knowledge by diffusing selected dopants into a silicon wafer.


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