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Micro/Nano Processing Technology

Micro/Nano Processing Technology

This course introduces the theory and technology of micro/nano fabrication. Lectures and laboratory sessions focus on basic processing techniques such as diffusion, oxidation, photolithography, chemical vapor deposition, and more. Through team lab assignments, students are expected to gain an understanding of these processing techniques, and how they are applied in concert to device fabrication. Students enrolled in this course have a unique opportunity to fashion and test micro/nano-devices, using modern techniques and technology.This course features detailed lecture slides in the lecture notes section, along with other lab materials used by students in the course in the labs section. In addition, problem sets with solutions are also provided in the assignments section.

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