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Semiconductor Manufacturing, Spring 2003

6.780 Semiconductor Manufacturing, a course through MIT's OpenCourseWare, covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics covered include: design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback control of equipment and processes; and analysis and scheduling...

Keywords:: Factory Design, Estimation, NSDL, Statistics, Scheduling, Distributions, Factory Modeling, Science -- Technology, Computer Sciences, Computer Integrated Manufacturing, Statistical Process Control, Spatial Models, Health and Safety, Empirical Equipment, Planning, Spatial Variation, Science -- Instructional Issues, Control Chart Design, Experimental Design, Run by Run, Factory Operation, Equipment/control, Semiconductor, Yield Learning, Factory Infrastructure, Yield Models, Equipment Diagnosis, Multistage Process Control, Hypothesis Testing, Engineering, Technology, Manufacturing, Advanced Process Control, Process Modeling, Education, Equipment Monitoring, Semiconductor Manufacturing, Electrical Engineering, Science -- Engineering

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Science and Technology / Computer Science

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Material Type:: Assignment
Date Added to MERLOT:: July 11, 2016
Date Modified in MERLOT:: July 11, 2016
Author:: Boning, Duane
Submitter:: Barbra Bied Sperling

Primary Audience:: College General Ed, College Lower Division, College Upper Division, Graduate School, Professional
Technical Format:: Website
Mobile Compatibility:: Not specified at this time
Language:: English
Cost Involved:: Yes
Source Code Available:: No
Accessibility Information Available:: Unknown
Creative Commons:: This work is licensed under a Attribution-NonCommercial-ShareAlike 3.0 United States